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Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II

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Bibliographic Details
Corporate Authors: Symposium on Crystalline Defects and Contamination (2nd : 1997 Paris, France); Electrochemical Society. Meeting 1997 Paris, France) (Paris, France)); Electrochemical Society. Electronics Division.; International Society of Electrochemistry. Meeting 1997 Paris, France) (Paris, France)); Symposium on Silicon Cleaning Technology (1997 Paris, France) (Paris, France))
Group Author: Kolbesen Bernd O.
Published: Electrochemical Society,
Publisher Address: Pennington, NJ
Publication Dates: c1997.
Literature type: Book
Language: English
Series: Proceedings ; v. 97-22
Subjects:
Contamination (Technology)
Integrated circuits > Very large scale integration > Congresses.
Crystals > Defects.
Carrier Form: x, 517 p.: ill. ; 23 cm.
ISBN: 1566771757
Index Number: TN470
CLC: TN470.5-532
Call Number: TN470.5-532/S989/1997/
Contents: "This ... volume contains the 13 invited papers, 21 of 22 contributed papers and 10 papers presented as poster at the Second Symposium on 'Crystalline Defects and Contamination: their Impact and Control in Device Manufacturing' which was part 01B of the Symposium on Silicon Cleaning Technology' held at the '1997 Joint International Meeting--The 192nd Meeting of the Electrochemical Society and the 48th Annual Meeting of the International Society of Electrochemistry' from August 31 to September 5, 1997 in Paris/France."--Preface.
Includes bibliographical references and indexes.

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