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Laser microfabrication：thin film processes and lithography

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Bibliographic Details
Group Author: Ehrlich Daniel J; Tsao Jeffrey Y
Published: Academic Press,
Publisher Address: Boston
Publication Dates: c1989.
Literature type: Book
Language: English
Subjects:
Lasers > Industrial applications
Thin film devices > Design and construction
Microlithography
Carrier Form: xii, 587 p.: ill. ; 24 cm.
ISBN: 0122334302
Index Number: TN249
CLC: TN249
Call Number: TN249/L343.5/
Contents: Includes bibliographies and index.

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